SU8

SU8 is a negative photoresist used to fabricate high aspect ratio fine structures with good mechanical properties, electrical insulation, chemical resistance, thermal stability, hydrophobicity and excellent biocompatibility. Make key structures for cell culture and screening biochips such as chips and molecular diagnostic chips. 
 
The key structure of the biochip is mostly a multi-layer composite structure, and the multilayer SU8 film has large stress and easy to fall off. 
 
The SU8 process developed by Hicomp can produce a multi-layer complex SU8 structure with a sidewall angle>85°, which helps customers to realize such biochip production and industrialization.